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Surface Texture and Structure of ZnO Films Synthesized by Off-Axis Sputtering DepositionMorphology and structure of ZnO films deposited on (0001) sapphire and glass substrates by off-axis sputtering are investigated at various temperatures and pressures. All films show highly textured structures on glass substrates and epitaxial growth on sapphire substrates. The full width at half maximum of theta rocking curves for epitaxial films is less than 0.5 degrees. In textured films, it rises to several degrees. The trend of surface textures in films grown at low pressures is similar to those grown at high temperatures. A morphology transition from large well-defined hexagonal grains to flat surface was observed at a pressure of 50 mtorr and temperature of 550 C. The experiment results are explained by the transport behavior of depositing species.
Document ID
20000021502
Acquisition Source
Marshall Space Flight Center
Document Type
Preprint (Draft being sent to journal)
Authors
Zhu, Shen
(Universities Space Research Association Huntsville, AL United States)
Su, Ching-Hua
(Alabama Univ. Huntsville, AL United States)
Lehoczky, Sandor L.
(Alabama Univ. Huntsville, AL United States)
George, M. A.
(Alabama Univ. Huntsville, AL United States)
Lowndes, D. H.
(Oak Ridge National Lab. TN United States)
Date Acquired
August 19, 2013
Publication Date
January 1, 1999
Subject Category
Nonmetallic Materials
Funding Number(s)
CONTRACT_GRANT: NCC8-66
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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