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Measured Attenuation of Coplanar Waveguide on CMOS Grade Silicon Substrates with Polyimide Interface LayerThe measured propagation constant of a coplanar waveguide on CMOS grade silicon with a polyimide interface layer is presented, It is shown that the transmission line can have an attenuation comparable to other transmission lines on Si substrates if the proper polyimide thickness is used.
Document ID
20000069785
Acquisition Source
Glenn Research Center
Document Type
Reprint (Version printed in journal)
Authors
Ponchak, G. E.
(NASA Glenn Research Center Cleveland, OH United States)
Katehi, L. P. B.
(Michigan Univ. Ann Arbor, MI United States)
Date Acquired
August 19, 2013
Publication Date
January 1, 2000
Publication Information
Publication: Electronics Letters
Volume: 34
Issue: 13
Subject Category
Electronics And Electrical Engineering
Funding Number(s)
PROJECT: RTOP 632-6E-51
Distribution Limits
Public
Copyright
Other

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