NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Transport Phenomena of Off-Axis Sputtering DepositionVarious high quality epitaxial films, especially oxides, have been synthesized using off-axis sputtering deposition. In this presentation, we report the experiment results of ZnO films grown by the off-axis sputtering deposition. Films were synthesized in temperatures ranged from room temperature to 600 C, and pressures from 5 mTorr to 150 mTorr. Film growth rate was measured by surface profilometer, ellipsometer, and wavelength dispersive spectrometry. Due to the collisions between the sputtered species and the residue gases, the kinetic energy of species was reduced and the transport of depositing species changed from a ballistic movement for low pressure to a diffuse drift for high pressure in which the transport species were almost thermalized. The measurements show an increase of growth rates along the gravity vector when the Knodson (Knudsen??) number of transport species is less than 0.05, which suggests that gravity affected the transport characterization in off-axis sputtering deposition. Because the product of pressure (p) and travel distance (d) of sputtered species, p exceeds several mTorr-cm during film deposition, the classical simulations for sputtering process in high vacuum system may not be applied. Based on these experimental measurements, a transport process of the off-axis sputtering deposition is proposed. Several methods including the Monte Carlo method and gravity-driven flow dynamics simulation will be discussed.
Document ID
20010072417
Acquisition Source
Marshall Space Flight Center
Document Type
Conference Paper
Authors
Zhu, S.
(NASA Marshall Space Flight Center Huntsville, AL United States)
Su, C. H.
(NASA Marshall Space Flight Center Huntsville, AL United States)
Lehoczky, S. L.
(NASA Marshall Space Flight Center Huntsville, AL United States)
Zhang, S.
(NASA Marshall Space Flight Center Huntsville, AL United States)
Whitaker, Ann F.
Date Acquired
August 20, 2013
Publication Date
January 14, 2001
Subject Category
Documentation And Information Science
Meeting Information
Meeting: 2nd Pan-Pacific Basin Workshop on Microgravity Sciences
Location: Pasadena, CA
Country: United States
Start Date: May 1, 2001
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Available Downloads

There are no available downloads for this record.
No Preview Available