Acquisition Source
Ames Research Center
Document Type
Conference Paper
Authors
Cruden, Brett A. (Eloret Corp. Moffett Field, CA United States) Rao, M. V. V. S. (Eloret Corp. Moffett Field, CA United States) Sharma, Surendra P. (NASA Ames Research Center Moffett Field, CA United States) Meyyappan, Meyya (NASA Ames Research Center Moffett Field, CA United States) Date Acquired
August 20, 2013
Publication Date
February 5, 2001
Meeting Information
Meeting: American Vacuum Society Conference and Microelectronics and Interfaces
Location: Santa Clara, CA
Country: United States
Start Date: February 5, 2001
End Date: February 9, 2001
Sponsors: American Vacuum Society
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.