Acquisition Source
Ames Research Center
Document Type
Conference Paper
Authors
Hwang, Helen H. (NASA Ames Research Center Moffett Field, CA United States) Keil, J. (Lam Research Corp. Fremont, CA United States) Helmer, B. A. (Lam Research Corp. Fremont, CA United States) Chien, T. (Lam Research Corp. Fremont, CA United States) Gopaladasu, P. (Lam Research Corp. Fremont, CA United States) Kim, J. (Samsung Corp. Korea, Democratic People's Republic of) Shon, J. (Lam Research Corp. Fremont, CA United States) Date Acquired
August 20, 2013
Publication Date
April 29, 2001
Subject Category
Computer Operations And Hardware Meeting Information
Meeting: Poster Presentation
Location: San Francisco, CA
Country: United States
Start Date: October 1, 2001
Sponsors: American Vacuum Society
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.