Acquisition Source
Ames Research Center
Document Type
Conference Paper
Authors
Hwang, Helen H. (NASA Ames Research Center Moffett Field, CA United States) Govindan, T. R. (Pennsylvania State Univ. United States) Meyyappan, M. (NASA Ames Research Center Moffett Field, CA United States) Date Acquired
August 20, 2013
Publication Date
January 1, 1998
Meeting Information
Meeting: 4th International Workshop on Advanced Plasma Tool and Process Engineering
Location: Millbrae, CA
Country: United States
Start Date: May 26, 1998
End Date: May 27, 1998
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.