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A Transport Model for Non-Local Heating of Electrons in ICP ReactorsA new model has been developed for non-local heating of electrons in ICP reactors, based on a hydrodynamic approach. The model has been derived using the electron momentum conservation in azimuthal direction with electromagnetic and frictional forces respectively as driving force and damper of harmonic oscillatory motion of electrons. The resulting transport equations include the convection of azimuthal electron momentum in radial and axial directions, thereby accounting for the non-local effects. The azimuthal velocity of electrons and the resulting electrical current are coupled to the Maxwell's relations, thus forming a self-consistent model for non-local heating. This model is being implemented along with a set of Navier-Stokes equations for plasma dynamics and gas flow to simulate low-pressure (few mTorr's) ICP discharges. Characteristics of nitrogen plasma in a TCP 300mm etch reactor is being studied. The results will be compared against the available Langmuir probe measurements.
Document ID
20020060769
Acquisition Source
Ames Research Center
Document Type
Conference Paper
Authors
Chang, C. H.
(Thermoscience Inst. Moffett Field, CA United States)
Bose, Deepak
(Thermoscience Inst. Moffett Field, CA United States)
Arnold, James O.
Date Acquired
August 20, 2013
Publication Date
January 1, 1998
Subject Category
Atomic And Molecular Physics
Meeting Information
Meeting: GEC 1998 Meeting of the American Physical Society
Location: Maui, HI
Country: United States
Start Date: November 19, 1998
End Date: November 22, 1998
Sponsors: American Physical Society
Funding Number(s)
PROJECT: RTOP 632-10-01
CONTRACT_GRANT: NAS2-14031
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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