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Structure of Thin-Film Lithium MicrobatteriesA process for making thin-film batteries including the steps of cleaning a glass or silicon substrate having an amorphous oxide layer several microns thick; defining with a mask the layer shape when depositing cobalt as an adhesion layer and platinum as a current collector; using the same mask as the preceding step to sputter a layer of LiC(0)O2, on the structure while rocking it back and forth; heating the substrate to 300 C. for 30 minutes; sputtering with a new mask that defines the necessary electrolyte area; evaporating lithium metal anodes using an appropriate shadow mask; and, packaging the cell in a dry-room environment by applying a continuous bead of epoxy around the active cell areas and resting a glass slide over the top thereof. The batteries produced by the above process are disclosed.
Document ID
20030068896
Acquisition Source
Headquarters
Document Type
Other - Patent
External Source(s)
NPO-21015|
Authors
Jay F Whitacre
(Jet Propulsion Laboratory La Cañada Flintridge, United States)
Ratnakumar V Bugga
(Jet Propulsion Laboratory La Cañada Flintridge, United States)
William C West
(Jet Propulsion Laboratory La Cañada Flintridge, United States)
Date Acquired
August 21, 2013
Publication Date
May 6, 2003
Subject Category
Electronics And Electrical Engineering
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-6,558,836
Patent Application
US-Patent-Appl-SN-779595
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