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Propagation Characteristics of Finite Ground Coplanar Waveguide on Si Substrates With Porous Si and Polyimide Interface LayersMeasured and modeled propagation characteristics of Finite Ground Coplanar (FGC) waveguide fabricated on a 15 ohm-cm Si substrate with a 23 micron thick, 68% porous Si layer and a 20 micron thick polyimide interface layer are presented for the first time. Attenuation and effective permittivity as function of the FGC geometry and the bias between the center conductor and the ground planes are presented. It is shown that the porous Si reduces the attenuation by 1 dB/cm compared to FGC lines with only polyimide interface layers, and the polyimide on porous silicon demonstrates negligible bias dependence.
Document ID
20030107617
Acquisition Source
Glenn Research Center
Document Type
Preprint (Draft being sent to journal)
Authors
Ponchak, George E.
(NASA Glenn Research Center Cleveland, OH, United States)
Itotia, Isaac K.
(Minnesota Univ. Minneapolis, MN, United States)
Drayton, Rhonda Franklin
(Minnesota Univ. Minneapolis, MN, United States)
Date Acquired
August 21, 2013
Publication Date
January 1, 2003
Subject Category
Electronics And Electrical Engineering
Meeting Information
Meeting: IEEE European Microwave Conference
Location: Munich
Country: Germany
Start Date: October 6, 2003
End Date: October 10, 2003
Sponsors: Institute of Electrical and Electronics Engineers
Funding Number(s)
WBS: WBS 22-322-20-03
Distribution Limits
Public
Copyright
Public Use Permitted.
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