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Integrated Microfluidic Gas Sensors for Water MonitoringA silicon-based microhotplate tin oxide (SnO2) gas sensor integrated into a polymer-based microfluidic system for monitoring of contaminants in water systems is presented. This device is designed to sample a water source, control the sample vapor pressure within a microchannel using integrated resistive heaters, and direct the vapor past the integrated gas sensor for analysis. The sensor platform takes advantage of novel technology allowing direct integration of discrete silicon chips into a larger polymer microfluidic substrate, including seamless fluidic and electrical interconnects between the substrate and silicon chip.
Document ID
20040031808
Acquisition Source
Goddard Space Flight Center
Document Type
Preprint (Draft being sent to journal)
Authors
Zhu, L.
(Maryland Univ. College Park, MD, United States)
Sniadecki, N.
(Maryland Univ. College Park, MD, United States)
DeVoe, D. L.
(Maryland Univ. College Park, MD, United States)
Beamesderfer, M.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Semancik, S.
(National Inst. of Standards and Technology Gaithersburg, MD, United States)
DeVoe, D. L.
(Maryland Univ. College Park, MD, United States)
Date Acquired
August 21, 2013
Publication Date
January 1, 2003
Subject Category
Fluid Mechanics And Thermodynamics
Meeting Information
Meeting: 7th International Conference of Miniaturized Chemical and Biochemical Analysis Systems, Transducers Research Foundation "MicroTAS 2003"
Location: Squaw Valley, CA
Country: United States
Start Date: October 5, 2003
End Date: October 9, 2003
Distribution Limits
Public
Copyright
Public Use Permitted.
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