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Accuracy Evaluation of Electron-Probe Microanalysis as Applied to Semiconductors and SilicatesAn evaluation of precision and accuracy will be presented for representative semiconductor and silicate compositions. The accuracy of electron-probe analysis depends on high precision measurements and instrumental calibration, as well as correction algorithms and fundamental parameter data sets. A critical assessment of correction algorithms and mass absorption coefficient data sets can be made using the alpha factor technique. Alpha factor analysis can be used to identify systematic errors in data sets and also of microprobe standards used for calibration.
Document ID
20040034034
Acquisition Source
Marshall Space Flight Center
Document Type
Conference Paper
Authors
Carpenter, Paul
Armstrong, John
Date Acquired
August 21, 2013
Publication Date
January 1, 2003
Subject Category
Solid-State Physics
Meeting Information
Meeting: 2004 Australian Conference on Microscopy and Microanalysis 18
Location: Geelong
Country: Australia
Start Date: February 1, 2004
End Date: February 6, 2004
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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