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Programmable 2-D Addressable Cryogenic Aperture MasksWe are developing a two-dimensional array of square microshutters (programmable aperture mask) for a multi-object spectrometer for the James Webb Space Telescope (JWST). This device will provide random access selection of the areas in the field to be studied. The device is in essence a close packed array of square slits, each of which can be opened independently to select areas of the sky for detailed study.The device is produced using a 100-micron thick silicon wafer as a substrate with 0.5-micron thick silicon nitride shutters on top of it. Silicon nitride has been selected as the blade and flexure material because its stiffness allows thinner and lighter structures than single crystal Si, the chief alternative, and because of its ease of manufacture. The 100 micron silicon wafer is backetched in a high aspect ratio Deep Reactive Ion Etching (Deep RIE) to leave only a support grid for the shutters and the address electronics. The shutter actuation is done magnetically whereas addressing is electrostatic. 128x128 format microshutter arrays have been produced. Their operation has been demostarted on 32x32 subarrays. Good reliability of the fabrication process and good quality of the microshutters has been achieved. The mechanical behavior and optical performance of the fabricated arrays at cryogenic temperature are being studied.
Document ID
20040068204
Acquisition Source
Goddard Space Flight Center
Document Type
Conference Paper
Authors
Kutyrev, A. S.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Moseley, S. H.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Jhabvala, M.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Li, M.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Schwinger, D. S.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Silverberg, R. F.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Wesenberg, R. P.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
August 21, 2013
Publication Date
February 1, 2004
Publication Information
Publication: International Thermal Detectors Workshop (TDW 2003)
Subject Category
Instrumentation And Photography
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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