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Large-Scale Fabrication of Carbon Nanotube Probe Tips For Atomic Force Microscopy Critical Dimension Imaging ApplicationsCarbon nanotube (CNT) probe tips for atomic force microscopy (AFM) offer several advantages over Si/Si3N4 probe tips, including improved resolution, shape, and mechanical properties. This viewgraph presentation discusses these advantages, and the drawbacks of existing methods for fabricating CNT probe tips for AFM. The presentation introduces a bottom up wafer scale fabrication method for CNT probe tips which integrates catalyst nanopatterning and nanomaterials synthesis with traditional silicon cantilever microfabrication technology. This method makes mass production of CNT AFM probe tips feasible, and can be applied to the fabrication of other nanodevices with CNT elements.
Document ID
20040084592
Acquisition Source
Ames Research Center
Document Type
Conference Paper
Authors
Ye, Qi Laura
(Eloret Corp. Moffett Field, CA, United States)
Cassell, Alan M.
(NASA Ames Research Center Moffett Field, CA, United States)
Stevens, Ramsey M.
(NASA Ames Research Center Moffett Field, CA, United States)
Meyyappan, Meyya
(NASA Ames Research Center Moffett Field, CA, United States)
Li, Jun
(NASA Ames Research Center Moffett Field, CA, United States)
Han, Jie
(NASA Ames Research Center Moffett Field, CA, United States)
Liu, Hongbing
(Integrated Nanosystems, Inc.)
Chao, Gordon
(Evans (Charles) and Associates CA)
Date Acquired
August 21, 2013
Publication Date
January 1, 2004
Subject Category
Mechanical Engineering
Meeting Information
Meeting: Materials Research Society 2004 Spring Meeting
Location: San Francisco, CA
Country: United States
Start Date: April 12, 2004
End Date: April 16, 2004
Funding Number(s)
CONTRACT_GRANT: NSF 03-20512
CONTRACT_GRANT: NAS2-03144
CONTRACT_GRANT: NAS2-99092
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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