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Microshutter Arrays for James Webb Space TelescopeTwo-dimensional MEMS microshutter arrays are being developed at NASA Goddard Space Flight Center for use in the near-infrared region on the James Webb Space Telescope (JWST). The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast. The JWST environment requires cryogenic operation at 35K. Microshutter arrays are fabricated out of silicon-oxide-insulated (SOI) silicon wafers. Arrays are close-packed silicon nitride membranes with a pixel size of 100x200 p. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. The mechanical shutter arrays are fabricated using MEMS technologies. The processing includes a multi- layer metal deposition and patterning of shutter electrodes and magnetic pads, reactive ion etching (NE) of the front side to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, followed by a deep RIE (DRIE) back-etch down to the nitride shutter membrane to form W e s and relieve shutters from the silicon substrate. An additional metal deposition and patterning is used to form back electrodes. Shutters are actuated using a magnetic force and latched using an electrostatic force. . . . KEYWORDS: microshutter, MEMS, RIE, DRIE, micro-optics, near inbred, space telescope
Document ID
20040171317
Acquisition Source
Goddard Space Flight Center
Document Type
Conference Paper
Authors
Li, Mary J.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Acuna, Nadine
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Beamesderfer, Michael
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Ewin, Audrey
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Fettig, Rainer
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Franz, Dave
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Hess, Larry
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Hu, Ron
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Kelly, Dan
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
King, Todd
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
August 22, 2013
Publication Date
January 1, 2004
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: SPIE International Symposium Smart Materials, Nano and Micro-Smart Systems
Location: Sydney
Country: Australia
Start Date: December 12, 2004
End Date: December 15, 2004
Sponsors: International Society for Optical Engineering
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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