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A MEMS Micro-Translation Stage with Long Linear TranslationA MEMS Micro-Translation Stage (MTS) actuator concept has been developed that is capable of traveling long distances, while maintaining low power, low voltage, and accuracy as required by many applications, including optical coupling. The Micro-Translation Stage (MTS) uses capacitive electrostatic forces in a linear motor application, with stationary stators arranged linearly on both sides of a channel, and matching rotors on a moveable shuttle. This creates a force that allows the shuttle to be pulled along the channel. It is designed to carry 100 micron-sized elements on the top surface, and can travel back and forth in the channel, either in a stepping fashion allowing many interim stops, or it can maintain constant adjustable speeds for a controlled scanning motion. The MTS travel range is limited only by the size of the fabrication wafer. Analytical modeling and simulations were performed based on the fabrication process, to assure the stresses, friction and electrostatic forces were acceptable to allow successful operation of this device. The translation forces were analyzed to be near 0.5 micron N, with a 300 micron N stop-to-stop time of 11.8 ms.
Document ID
20050000034
Acquisition Source
Marshall Space Flight Center
Document Type
Preprint (Draft being sent to journal)
Authors
Ferguson, Cynthia K.
(NASA Marshall Space Flight Center Huntsville, AL, United States)
English, J. M.
(Alabama Univ. Huntsville, AL, United States)
Nordin, G. P.
(Alabama Univ. Huntsville, AL, United States)
Ashley, P. R.
(Army Research Development and Engineering Center United States)
Abushagur, M. A. G.
(Rochester Inst. of Tech. NY, United States)
Date Acquired
August 22, 2013
Publication Date
January 1, 2004
Subject Category
Electronics And Electrical Engineering
Meeting Information
Meeting: NAN0 and Microsystems Technology and Metrologies Conference
Location: Huntsville, AL
Country: United States
Start Date: November 17, 2004
End Date: November 18, 2004
Distribution Limits
Public
Copyright
Public Use Permitted.
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