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Design and fabrication of a large vertical travel silicon inchworm microactuator for advanced segmented silicon space telescope (ASSIST)The goal of this research is to develop inchworm motor systems capable of simultaneously providing nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space.
Document ID
20060029826
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/9448
Authors
Yang, E.
Dekany, R.
Padin, S.
Date Acquired
August 23, 2013
Publication Date
January 1, 2003
Subject Category
Optics
Distribution Limits
Public
Copyright
Other
Keywords
MEMS NEMS space NASA JPL adaptive optics inchworm actuator

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