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Fabrication of 20 nm embedded longitudinal nanochannels transferred from metal nanowire patternsbstract we describe a technique for fabricating nanometer-scale channels embedded by dielectric materials. Longitudinal 'embedded ' nanochannels with an opening size 20 nm x 80 nm have been successfully fabricated on silicon wafer by transferring sacrificial nanowire structures.
Document ID
20060030074
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Choi, D.
Yang, E. H.
Date Acquired
August 23, 2013
Publication Date
February 20, 2003
Distribution Limits
Public
Copyright
Other
Keywords
Nanochannels FIB lift-off diffusion

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