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High performance MEMS micro-gyroscopeThis paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recently rate tested.
Document ID
20060030678
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/11688
Authors
Bae, S. Y.
Hayworth, K. J.
Yee, K. Y.
Shcheglov, K.
Challoner, A. D.
Wiberg, D. V.
Date Acquired
August 23, 2013
Publication Date
May 6, 2002
Distribution Limits
Public
Copyright
Other
Keywords
green chart bias instabilities STS DRIE 8-electrode layout electrostatic tuning

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