NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Fabrication and Characterization of Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) DeviceThis paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited multilayer giant magnetoresistive (GMR) sensor. The device consists of a micromachined microstructure (membrane), GMR sensor, and a sputtered hard magnetic thin film element on to microstructure.
Document ID
20060033887
Acquisition Source
Jet Propulsion Laboratory
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Ramesham, R.
Olivas, J.
Stokes, S.
Wilson, W.
Generazio, E.
Date Acquired
August 23, 2013
Publication Date
January 1, 1999
Publication Information
Publication: Thin Solid Films
Subject Category
Solid-State Physics
Distribution Limits
Public
Copyright
Other
Keywords
GMR MEMS spin valves micromachining hard magnetic thin films

Available Downloads

There are no available downloads for this record.
No Preview Available