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MEMS for Space Flight ApplicationsMicro-Electrical Mechanical Systems (MEMS) are entering the stage of design and verification to demonstrate the utility of the technology for a wide range of applications including sensors and actuators for military, space, medical, industrial, consumer, automotive and instrumentation products.
Document ID
20060034764
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/20327
Authors
Lawton, R.
Date Acquired
August 23, 2013
Publication Date
August 4, 1998
Subject Category
Lasers And Masers
Distribution Limits
Public
Copyright
Other
Keywords
AFM infrared microscopy IR light emission microscopy LE acoustic microscopy
electron microscopy SEM focused ion beam techniques FIB atomic force microscopy
Micro-Electrical Mechanical Systems MEMS scanning laser microscopy SLM scanning

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