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Automated Optical Extraction from Line Arrays of the Alignment Between Microfabricated LayersMachine reading of layer alignment from line arrays in fully fabricated wafers is demonstrated. Misalignment is calculated from the correlation funcation of optical intensity scans through arrays in the two layers.
Document ID
20060035353
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
Authors
Lieneweg, Udo
Date Acquired
August 23, 2013
Publication Date
June 1, 1997
Distribution Limits
Public
Copyright
Other
Keywords
Layer Alignment Fabricated Wafers

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