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Processing of Superconductor-Normal-Superconductor Josephson Edge JunctionsThe electrical behavior of epitaxial superconductor-normal-superconductor (SNS) Josephson edge junctions is strongly affected by processing conditions. Ex-situ processes, utilizing photoresist and polyimide/photoresist mask layers, are employed for ion milling edges for junctions with Yttrium-Barium-Copper-Oxide (YBCO) electrodes and primarily Co-doped YBCO interlayers.
Document ID
20060035376
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
Authors
Kleinsasser, A. W.
Barner, J. B.
Date Acquired
August 23, 2013
Publication Date
December 1, 1997
Distribution Limits
Public
Copyright
Other
Keywords
photoresist polyimide process interlayer materials

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