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Modulation Collimator Fine Grids for HESPThe proposed High Engergy-Solar Physics (HESP) million will require fine, precise, high aspect ratio modulation collimators for the High Energy Imagin Spectrometer (HEISPEC). The fabrication approach described here rests on the proven precision of semiconductor lithography - the ability to replicate extremely accurate patterns onto different planar substrateds.
Document ID
20060037802
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/32550
Authors
Hecht, M.
Ling, J.
Siegel, P.
Kenny, T.
Grunthaner, F.
Date Acquired
August 23, 2013
Publication Date
January 1, 1993
Distribution Limits
Public
Copyright
Other
Keywords
LIGA HESP pitch structures solar x-rays gamma rays acrylic

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