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A New Force Balanced Accelerometer Using Tunneling Tip Position SensingIn this paper, we report the initial development of a single-axis bulk micromachined accelerometer. The device employs an electron tunneling tip as a position detector in a force feedback control system. Control electrodes are placed above and below the proof mass and act as electrostatic force plates. Using the force plates, the position of the proof mass relative to the tunneling tip can be controlled.
Document ID
20060038995
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
Authors
Zavracky, P.
Hartley, F.
Sherman, N.
Warner, K.
Date Acquired
August 23, 2013
Publication Date
July 7, 1993
Distribution Limits
Public
Copyright
Other
Keywords
accelerometers sensors position detectors

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