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Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gasesThe success of NASA's future space missions and the development of portable, commercial instrument packages will depend greatly on miniaturized components enabled by the use of microelectromechanical systems (MEMS).
Document ID
20060040465
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/15743
Authors
Vargo, S. E.
Green, A. A.
Muntz, E. P.
Date Acquired
August 23, 2013
Publication Date
November 5, 2000
Distribution Limits
Public
Copyright
Other
Keywords
Knudsen compressor thermal transpiration MEMS vacuum pump rarefied flows

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