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Depth Measurements Using Alpha Particles and Upsettable SRAMsA custom designed SRAM was used to measure the thickness of integrated circuit over layers and the epi-layer thickness using alpha particles and a test SRAM. The over layer consists of oxide, nitride, metal, and junction regions.
Document ID
20060041818
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/29244
Authors
Buehler, M. G.
Reier, M.
Soli, G. A.
Date Acquired
August 23, 2013
Publication Date
March 1, 1995
Publication Information
Publication: IEEE Proceedings of the International Conference on Microelectronic Test Structures
Meeting Information
Meeting: IEEE International Conference on Microelectronic Test Structures
Location: Nara
Country: Japan
Start Date: March 1, 1995
Distribution Limits
Public
Copyright
Other
Keywords
upsettable SRAMs

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