Acquisition Source
Jet Propulsion Laboratory
Document Type
Reprint (Version printed in journal)
Authors
Paul M. Zavracky, Bob McClelland, Keith Warner, Neil Sherman, Frank Hartley Date Acquired
August 23, 2013
Publication Date
January 1, 1995
Publication Information
Publication: Journal of Micro Mechanics and Micro Engineering
Distribution Limits
Public
Keywords
tunneling tip accelerometer, accelerometer fabrication