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Gas Sensor Test ChipA new test chip is being developed to characterize conducting polymers used in gas sensors. The chip, a seven-layer cofired alumina substrate with gold electrodes, contains 11 comb and U- bend test structures. These structures are designed to measure the sheet resistance, conduction anisotropy, and peripheral conduction of spin-coated films that are not subsequently patterned.
Document ID
20060042045
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Buehler, M.
Ryan, M.
Date Acquired
August 23, 2013
Publication Date
January 1, 1995
Distribution Limits
Public
Copyright
Other
Keywords
conducting polymers gas sensors test chipnd peripheral conduction spin-coated
films

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