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Signal processing for order 10 pm accuracy displacement metrology in real-world scientific applicationsThis paper describes heterodyne displacement metrology gauge signal processing methods that achieve satisfactory robustness against low signal strength and spurious signals, and good long-term stability. We have a proven displacement-measuring approach that is useful not only to space-optical projects at JPL, but also to the wider field of distance measurements.
Document ID
20060043404
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Halverson, Peter G.
Loya, Frank M.
Date Acquired
August 23, 2013
Publication Date
March 1, 2004
Meeting Information
Meeting: International Conference on Space Optics
Location: Toulouse
Country: France
Start Date: March 30, 2004
Distribution Limits
Public
Copyright
Other
Keywords
metrology
phase measurement
interferometry

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