Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
Date Acquired
August 23, 2013
Publication Date
January 25, 2005
Meeting Information
Meeting: International Society for Optical Engineering (SPIE) Photonics West, Micromachining Technology for Microoptics and Nanooptics
Location: San Jose, CA
Country: United States
Start Date: January 25, 2005
End Date: January 27, 2005
Distribution Limits
Public
Keywords
electron-beam lithographynanostructure fabricationmicro opticsgratingsdiffractive optics