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Delta Doping High Purity CCDs and CMOS for LSSTA viewgraph presentation describing delta doping high purity CCD's and CMOS for LSST is shown. The topics include: 1) Overview of JPL s versatile back-surface process for CCDs and CMOS; 2) Application to SNAP and ORION missions; 3) Delta doping as a back-surface electrode for fully depleted LBNL CCDs; 4) Delta doping high purity CCDs for SNAP and ORION; 5) JPL CMP thinning process development; and 6) Antireflection coating process development.
Document ID
20060051815
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Blacksberg, Jordana
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Nikzad, Shouleh
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Hoenk, Michael
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Elliott, S. Tom
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Bebek, Chris
(California Univ., Lawrence Berkeley National Lab. Berkeley, CA, United States)
Holland, Steve
(California Univ., Lawrence Berkeley National Lab. Berkeley, CA, United States)
Kolbe, Bill
(California Univ., Lawrence Berkeley National Lab. Berkeley, CA, United States)
Date Acquired
August 23, 2013
Publication Date
January 1, 2006
Subject Category
Solid-State Physics
Meeting Information
Meeting: LSST Sensor Working Group Teleconference (Vie Telecon}
Country: United States
Start Date: June 27, 2006
Distribution Limits
Public
Copyright
Other
Keywords
CMOS
Delta doping
CCD
detectors

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