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Design and Fabrication Highlights Enabling a 2 mm, 128 Element Bolometer Array for GISMOThe Backshort-Under-Grid (BUG) superconducting bolometer array architecture is intended to be highly versatile, operating in a large range of wavelengths and background conditions. We have undertaken a three-year program to develop key technologies and processes required to build kilopixel arrays. To validate the basic array design and to demonstrate its applicability for future kilopixel arrays, we have chosen to demonstrate a 128 element bolometer array optimized for 2 mm wavelength using a newly built Goddard instrument, GISMO (Goddard /RAM Superconducting 2-millimeter Observer). The arrays are fabricated using batch wafer processing developed and optimized for high pixel yield, low noise, and high uniformity. The molybdenum-gold superconducting transition edge sensors are fabricated using batch sputter deposition and are patterned using dry etch techniques developed at Goddard. With a detector pitch of 2 mm 8x16 array for GISMO occupies nearly one half of the processing area of a 100 mm silicon-on-insulator starting wafer. Two such arrays are produced from a single wafer along with witness samples for process characterization. To provide thermal isolation for the detector elements, at the end of the process over 90% of the silicon must be removed using deep reactive ion etching techniques. The electrical connections for each bolometer element are patterned on the top edge of the square grid supporting the array. The design considerations unique to GISMO, key fabrication challenges, and laboratory experimental results will be presented.
Document ID
20070035135
Acquisition Source
Goddard Space Flight Center
Document Type
Conference Paper
Authors
Allen, Christine
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Benford, Dominic
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Miller, Timothy
(Muniz Engineering, Inc. Lanham, MD, United States)
Staguhn, Johannes
(Maryland Univ. College Park, MD, United States)
Wollack, Edward
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Moseley, Harvey
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
August 24, 2013
Publication Date
January 1, 2007
Subject Category
Electronics And Electrical Engineering
Meeting Information
Meeting: 12th International Workshop on Low Temperature Detectors
Location: Paris
Country: France
Start Date: July 22, 2007
End Date: July 27, 2007
Distribution Limits
Public
Copyright
Other

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