NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
A Wafer Transfer Technology for MEMS Adaptive OpticsAdaptive optics systems require the combination of several advanced technologies such as precision optics, wavefront sensors, deformable mirrors, and lasers with high-speed control systems. The deformable mirror with a continuous membrane is a key component of these systems. This paper describes a new technique for transferring an entire wafer-level silicon membrane from one substrate to another. This technology is developed for the fabrication of a compact deformable mirror with a continuous facet. A 1 (mu)m thick silicon membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers (i.e. wax, epoxy, or photoresist). Smaller or larger diameter membranes can also be transferred using this technique. The fabricated actuator membrane with an electrode gap of 1.5 (mu)m shows a vertical deflection of 0.37 (mu)m at 55 V.
Document ID
20070036011
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
Authors
Yang, Eui-Hyeok
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Wiberg, Dean V.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 24, 2013
Publication Date
November 16, 2001
Subject Category
Optics
Meeting Information
Meeting: ASME MEMES Symposium/International Mechanical Engineering Congress and Exposition
Location: New York, NY
Country: United States
Start Date: November 16, 2001
Distribution Limits
Public
Copyright
Other
Keywords
Micro Electro Mechanical Systems (MEMS)
wafer transfers
adaptive optics

Available Downloads

There are no available downloads for this record.
No Preview Available