Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
Authors
Yang, Eui-Hyeok (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Wiberg, Dean V. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Date Acquired
August 24, 2013
Publication Date
November 16, 2001
Meeting Information
Meeting: ASME MEMES Symposium/International Mechanical Engineering Congress and Exposition
Location: New York, NY
Country: United States
Start Date: November 16, 2001
Distribution Limits
Public
Keywords
Micro Electro Mechanical Systems (MEMS)wafer transfersadaptive optics