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Low Power, Wide Dynamic Range Carbon Nanotube Vacuum GaugesThis slide presentation presents carbon nanotube vacuum pressure sensor gauges that operate at low power and exhibit a wide-dynamic range based on microelectromechanical systems (MEMS) technology. The fabrication facility, and the formation process are shown. Pressure sensitivity was found to increase rapidly as the bias power was increased. In addition, by etching part of the thermal SiO2 beneath the tubes and minimizing heat conduction through the substrate, pressure sensitivity was extended toward lower pressures. Results are compared to a conventional thin film meander resistor, which was fabricated and whose pressure response was also measured for comparative purposes.
Document ID
20100017878
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Kaul, Anupama B.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Manohara, Harish M.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 24, 2013
Publication Date
January 16, 2008
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: IEEE MEMS Conference 2008
Location: Tucson, AZ
Country: United States
Start Date: January 13, 2008
End Date: January 17, 2008
Sponsors: Institute of Electrical and Electronics Engineers
Funding Number(s)
CONTRACT_GRANT: NAS7-03001
Distribution Limits
Public
Copyright
Other
Keywords
JEOL E-beam aligner
carbon nanotubes
pressure sensors
vacuum gauges
microelectromechanical systems (MEMS)
Dektak profilometer
E-beam evaporator

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