Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
Authors
Kaul, Anupama B. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Manohara, Harish M. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Date Acquired
August 24, 2013
Publication Date
January 16, 2008
Subject Category
Instrumentation And Photography Meeting Information
Meeting: IEEE MEMS Conference 2008
Location: Tucson, AZ
Country: United States
Start Date: January 13, 2008
End Date: January 17, 2008
Sponsors: Institute of Electrical and Electronics Engineers
Funding Number(s)
CONTRACT_GRANT: NAS7-03001
Distribution Limits
Public
Keywords
JEOL E-beam alignercarbon nanotubespressure sensorsvacuum gaugesmicroelectromechanical systems (MEMS)Dektak profilometerE-beam evaporator