Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
Authors
Jung, C. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Thomas, B. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Lee, C. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Peralta, A. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Chattopadhyay, G. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Gill, J. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Cooper, K. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Mehdi, I. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Date Acquired
August 26, 2013
Publication Date
April 25, 2011
Subject Category
Electronics And Electrical Engineering Meeting Information
Meeting: IEEE International Microwave Symposium
Location: Baltimore, MD
Country: United States
Start Date: April 25, 2011
Sponsors: Institute of Electrical and Electronics Engineers
Distribution Limits
Public
Keywords
Silicon micromachiningdeep-reactive ion etchingnanotechnologiessuper-compactreceiver front-endssurface roughness