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Large Format Transition Edge Sensor Microcalorimeter ArraysWe have produced a variety of superconducting transition edge sensor array designs for microcalorimetric detection of x-rays. Designs include kilopixel scale arrays of relatively small sensors (approximately 75 micron pitch) atop a thick metal heat sinking layer as well as arrays of membrane-isolated devices on 250 micron and up to 600 micron pitch. We discuss fabrication and performance of microstripline wiring at the small scales achieved to date. We also address fabrication issues with reduction of absorber contact area in small devices.
Document ID
20120016609
Acquisition Source
Goddard Space Flight Center
Document Type
Presentation
Authors
Chervenak, J. A.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Adams, J. A.
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Bandler, S. b.
(Maryland Univ. College Park, MD, United States)
Busch, S. E.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Eckart, M. E.
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Ewin, A. E.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Finkbeiner, F. M.
(Wyle Information Systems, LLC McLean, VA, United States)
Kilbourne, C. A.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Kelley, R. L.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Porst, J. P.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Porter, F. S.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Ray, C.
(MEI Technologies, Inc. Lanham, MD, United States)
Sadleir, J. E.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Smith, S. J.
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Wassell, E. J.
(MEI Technologies, Inc. Lanham, MD, United States)
Date Acquired
August 26, 2013
Publication Date
October 8, 2012
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
GSFC.OVPR.7473.2012
Meeting Information
Meeting: Applied Superconductivity Conference
Location: Portland, OR
Country: United States
Start Date: October 8, 2012
End Date: October 12, 2012
Distribution Limits
Public
Copyright
Public Use Permitted.
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