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Array Technology for Terahertz ImagingHeterodyne terahertz (0.3 - 3THz) imaging systems are currently limited to single or a low number of pixels. Drastic improvements in imaging sensitivity and speed can be achieved by replacing single pixel systems with an array of detectors. This paper presents an array topology that is being developed at the Jet Propulsion Laboratory based on the micromachining of silicon. This technique fabricates the array's package and waveguide components by plasma etching of silicon, resulting in devices with precision surpassing that of current metal machining techniques. Using silicon increases the versatility of the packaging, enabling a variety of orientations of circuitry within the device which increases circuit density and design options. The design of a two-pixel transceiver utilizing a stacked architecture is presented that achieves a pixel spacing of 10mm. By only allowing coupling from the top and bottom of the package the design can readily be arrayed in two dimensions with a spacing of 10mm x 18mm.
Document ID
20130000063
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Reck, Theodore
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Siles, Jose
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Jung, Cecile
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Gill, John
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Lee, Choonsup
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Chattopadhyay, Goutam
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Mehdi, Imran
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Cooper, Ken
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 27, 2013
Publication Date
April 23, 2012
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: SPIE Defense and Security Symposium
Location: Baltimore, MD
Country: United States
Start Date: April 23, 2012
End Date: April 27, 2012
Sponsors: International Society for Optical Engineering
Funding Number(s)
CONTRACT_GRANT: HSHQDC-11-X-00122
Distribution Limits
Public
Copyright
Other
Keywords
Terahertz
silicon
array
micromachining
imaging

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