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The DUV Stability of Superlattice-Doped CMOS Detector ArraysJPL and Alacron have recently developed a high performance, DUV camera with a superlattice doped CMOS imaging detector. Supperlattice doped detectors achieve nearly 100% internal quantum efficiency in the deep and far ultraviolet, and a single layer, Al2O3 antireflection coating enables 64% external quantum efficiency at 263nm. In lifetime tests performed at Applied Materials using 263 nm pulsed, solid state and 193 nm pulsed excimer laser, the quantum efficiency and dark current of the JPL/Alacron camera remained stable to better than 1% precision during long-term exposure to several billion laser pulses, with no measurable degradation, no blooming and no image memory at 1000 fps.
Document ID
20150007350
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Hoenk, M. E.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Carver, A. G.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Jones, T.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Dickie, M.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Cheng, P.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Greer, H. F.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Nikzad, S.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Sgro, J.
(Alacron, Inc. Nashua, NH, United States)
Tsur, S.
(Applied Materials, Inc. Santa Clara, CA, United States)
Date Acquired
May 5, 2015
Publication Date
June 12, 2013
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: 2013 International Image Sensor Workshop
Location: Snowbird, UT
Country: United States
Start Date: June 12, 2013
End Date: June 16, 2013
Sponsors: Aptina Imaging Corp., International Image Sensor Society (IISS), BAE Systems
Distribution Limits
Public
Copyright
Other
Keywords
silicon detectors
deep ultraciolet (DUV) camera

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