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2D Electrostatic Actuation of Microshutter ArraysElectrostatically actuated microshutter arrays consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters, while maintaining their structural integrity. Mechanical and electromechanical test systems were constructed to measure the static and dynamic behavior of the microshutters. The torsional stiffness was reduced by a factor of four over initial designs without sacrificing durability. Analysis of the resonant behavior of the microshutters demonstrates that the first resonant mode is a torsional mode occurring around 3000 Hz. At low vacuum pressures, this resonant mode can be used to significantly reduce the drive voltage necessary for actuation requiring as little as 25V. 2D electrostatic latching and addressing was demonstrated using both a resonant and pulsed addressing scheme.
Document ID
20150020840
Acquisition Source
Goddard Space Flight Center
Document Type
Reprint (Version printed in journal)
Authors
Burns, Devin E.
(Oak Ridge Associated Universities Greenbelt, MD, United States)
Oh, Lance H.
(SGT, Inc. Greenbelt, MD, United States)
Li, Mary J.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Kelly, Daniel P.
(ASRC Federal Space and Defense Greenbelt, MD, United States)
Kutyrev, Alexander S.
(Maryland Univ. College Park, MD, United States)
Moseley, Samuel H.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
November 4, 2015
Publication Date
January 1, 2015
Publication Information
Publication: Journal of Microelectromechanical Systems
Publisher: IEEE Electron Devices Society
Volume: 25
Issue: 6
Subject Category
Instrumentation And Photography
Report/Patent Number
GSFC-E-DAA-TN27252
Funding Number(s)
CONTRACT_GRANT: NNG13CR48C
CONTRACT_GRANT: NNH06CC03B
CONTRACT_GRANT: NNG06EO90A
Distribution Limits
Public
Copyright
Other
Keywords
Multiobject Imaging

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