NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login

Press Enter or click the Search button to begin your search.

Back to Results
Deposition and evaluation of silicon films formed by pyrolytic decomposition of silane on oxidized silicon single crystalsDeposition and evaluation of silicon films formed by pyrolytic decomposition of silane on oxidized silicon single crystals
Document ID
19690030717
Acquisition Source
Legacy CDMS
Document Type
Technical Memorandum (TM)
Authors
Fripp, A. L., Jr. (NASA Langley Research Center Hampton, VA, United States)
Date Acquired
September 2, 2013
Publication Date
June 1, 1969
Subject Category
Chemistry
Report/Patent Number
NASA-TM-X-61916
Report Number: NASA-TM-X-61916
Accession Number
69N40102
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Related Records

There are no records associated with this record.
No Preview Available