Development of optical diaphragm deflection sensors

The objective of this project was to develop high-temperature pressure sensors using non-metallic components and optical sensing methods. The sensors are to operate over a temperature range from room temperature approx. 20C to 540C, to respond to internal pressure up to 690 kPa, to respond to external pressure up to 690 kPa, and to withstand external overpressure of 2070 kPa. Project tasks include evaluating sensing techniques and sensor systems. These efforts include materials and sensing method selection, sensor design, sensor fabrication, and sensor testing. Sensors are tested as a function of temperature, pressure, overpressure, and vibration. The project results show that high-temperature pressure sensors based on glass components and optical sensing methods are feasible. The microbend optical diaphragm deflection sensor exhibits the required sensitivity and stability for use as a pressure sensor with temperature compensation. for the microbend sensor, the 95% confidence level deviation of input pressure from the pressure calculated from the overall temperature-compensated calibration equation is 3.7% of full scale. The limitations of the sensors evaluated are primarily due to the restricted temperature range of suitable commercially available optical fibers and the problems associated with glass-to-metal pressure sealing over the entire testing temperature range.