Ultra-Low-Cost Room Temperature SiC Thin Films

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The research group at CSU has conducted theoretical and experimental research on 'Ultra-Low-Cost Room Temperature SiC Thin Films.'

Document ID

19970013659

Acquisition Source

Legacy CDMS

Document Type

Contractor Report (CR)

Authors

Date Acquired

September 6, 2013

Publication Date

March 14, 1997

Subject Category

Report/Patent Number

Accession Number

97N17377

Funding Number(s)

Distribution Limits

Public

Work of the US Gov. Public Use Permitted.

Name

Type

STI

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