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MEMS, Ka-Band Single-Pole Double-Throw (SPDT) Switch for Switched Line Phase ShiftersKa-band MEMS doubly anchored cantilever beam capacitive shunt devices are used to demonstrate a MEMS SPDT switch fabricated on high resistivity silicon (HRS) utilizing finite ground coplanar waveguide (FGC) transmission lines. The SPDT switch has an insertion loss (IL), return loss (RL), and isolation of 0.3dB, 40dB, and 30 dB, respectively at Ka-band.
Document ID
20020061296
Acquisition Source
Glenn Research Center
Document Type
Preprint (Draft being sent to journal)
Authors
Scardelletti, Maximilian C.
(NASA Glenn Research Center Cleveland, OH United States)
Ponchak, George E.
(NASA Glenn Research Center Cleveland, OH United States)
Varaljay, Nicholas C.
(NASA Glenn Research Center Cleveland, OH United States)
Date Acquired
September 7, 2013
Publication Date
May 1, 2002
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
NAS 1.15:211510
E-13288
NASA/TM-2002-211510
Report Number: NAS 1.15:211510
Report Number: E-13288
Report Number: NASA/TM-2002-211510
Meeting Information
Meeting: URSI National Radio Science Meeting
Location: San Antonio, TX
Country: United States
Start Date: June 16, 2002
End Date: June 21, 2002
Sponsors: Institute of Electrical and Electronics Engineers
Funding Number(s)
PROJECT: RTOP 755-08-0B
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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