Evaluation of Dry, Rough Vacuum Pumps

This document provides information on the testing and evaluation of thirteen dry rough vacuum pumps of various designs and from various manufacturers. Several types of rough vacuum pumps were evaluated, including scroll, roots, and diaphragm pumps. Tests included long term testing, speed curve generation, voltage variance, vibrations emissions and susceptibility, electromagnetic interference emissions and susceptibility, static leak rate, exhaust restriction, response/recovery time tests, and a contamination analysis for scroll pumps. Parameters were found for operation with helium, which often is not provided from the manufacturer