NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login

Press Enter or click the Search button to begin your search.

Back to Results
Ultraviolet optical properties of aluminum fluoride thin films deposited by atomic layer deposition
External Source
chorus
Document Type
Accepted Manuscript
Authors
John Hennessy
April D. Jewell
Kunjithapatham Balasubramanian
Shouleh Nikzad
Date Acquired
October 26, 2026
Publication Information
Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Publisher: American Vacuum Society
Volume: 34
Issue: 1
Issue Publication Date: January 1, 2016
ISSN: 0734-2101
e-ISSN: 1520-8559
DOI: 10.1116/1.4935450
Distribution Limits
Public

Available Downloads

There are no available downloads for this record.

Related Records

There are no records associated with this record.
Document Not Available for PreviewClick to Access Document