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A Nanochannel fabrication technique using chemical-mechanical polishing (CMP) and thermal oxidation
External Source
jpl
Document Type
Preprint
Authors
Lee, Choonsup
Yang, Eui-Hyeok
Myung, Nosang V.
George, Thomas
Date Acquired
February 10, 2024
Publication Date
October 5, 2003
Publication Information
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2003.
DOI: http://hdl.handle.net/2014/39200
Distribution Limits
Public

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