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Modelling analysis for design of microshutters with new electrode configuration
External Source
chorus
Document Type
Version of Record
Authors
Ming Ke
Alexander S. Kutyrev
Carl A. Kotecki
Kyowon Kim
Matthew A. Greenhouse
Meng-Ping Chang
Rainer Fettig
Regis P. Brekosky
Yongjie Hu
Date Acquired
October 26, 2026
Publication Information
Publication: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Volume: 343
Issue Publication Date: August 1, 2022
ISSN: 0924-4247
DOI: 10.1016/j.sna.2022.113661
Funding Number(s)
funding: 600\u201318-7126
funding: 600\u201318-7126-Scalable
Distribution Limits
Public

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