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SPUTTERING ION SOURCE FOR SOLIDSSputtering argon ion source used for analysis of solids provides more stable operation than a spark source and allows electrometric recording of the mass spectrum
Document ID
19630025757
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Herzog, F. K.
Liebl, H. J.
Date Acquired
August 1, 2013
Publication Date
September 1, 1963
Subject Category
Physics, General
Accession Number
63A21816
Funding Number(s)
CONTRACT_GRANT: NAS7-100
Distribution Limits
Public
Copyright
Other
Keywords
MASS SPECTROSCOPY
SPUTTERING
ION BOMBARDMENT

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