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Sputtering at oblique angles of ion incidenceSputtering at oblique angles of ion incidence
Document ID
19640008166
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Technical Note (TN)
Authors
Snouse, T. W.
(NASA Ames Research Center Moffett Field, CA, United States)
Date Acquired
September 2, 2013
Publication Date
April 1, 1964
Subject Category
Physics, General
Report/Patent Number
NASA-TN-D-2235
Report Number: NASA-TN-D-2235
Accession Number
64N18080
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
SPUTTERING
ION DISTRIBUTION
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