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Comment on ''sputtering ion source for solids.''Quantitative mass analysis of solid surfaces by sputtering ion source
Document ID
19640041547
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Smith, H. P., Jr.
Date Acquired
August 2, 2013
Publication Date
October 1, 1964
Subject Category
Physics, Plasma
Accession Number
64A27440
Funding Number(s)
CONTRACT_GRANT: NSG-243-62
Distribution Limits
Public
Copyright
Other
Keywords
SPUTTERING
ION SOURCE

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